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AN INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING 2ND EDITION

an-introduction-to-microelectromechanical-systems-

This ordinal edition brings readers up-to-date with the stylish developement in this cutting-edge areas. Provides a untechnical launching to the elating earth of micro-electromechanical systems (MEMS) that exposit in discourse the materials utilised in producing MEMS

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